![]() ![]() The MEMS+ models have been optimized to run in MATLAB Simulink ® or Cadence ®. Layout information from the MEMS + software can also be transferred to Coventor’s Analyzer (in CoventorWare), so that detailed device designs can be completed using MEMS-specific FEM solvers in CoventorWare.įigure 3: MEMS+ high-order components used to assemble a model of a scanning mirror ![]() By simulating the MEMS device together with the control system early in the design flow, costly redesign is avoided late in the design cycle. The methodology leverages Coventor’s MEMS + to enable fast device design and co-simulation with the drive electronics. Furthermore, successful MOEMS design requires the combined expertise of MEMS device and ASIC Engineers, particularly for MEMS arrays where RC delays induce cross talk, reducing screen performance.Ĭoventor’s hybrid design flow helps MEMS teams to meet their performance criteria while simultaneously reducing cost and time to market. To maximize process yield, process and material tolerances also need to be taken into account in the design phase. Other critical design parameters include contact dynamics, frequency hysteresis, temperature drift, shock dynamics, package deformation, gas damping, and power. The main design challenge for a typical MOEMS device is to optimize switching speed, which involves understanding mode shapes and frequencies of oscillation. ![]() Figure 1: Examples of optical MEMS devices Design Challenges ![]()
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